Author Details
Уваров, И. В.
Issue | Section | Title | File |
Vol 52, No 6 (2023) | МЭМС-УСТРОЙСТВА | MEMS SWITCH BASED ON CANTILEVER WITH INCREASED CONTACT FORCE | |
Vol 52, No 6 (2023) | МОДЕЛИРОВАНИЕ | Performance calculation for a MEMS switch with «floating» electrode | |
Vol 52, No 3 (2023) | МЭМС–УСТРОЙСТВА | Fast Electrochemical Micropump for Portable Drug Delivery Module | |
Vol 54, No 2 (2025) | ДИАГНОСТИКА | Measuring adhesion energy between MEMS structures using an adhered cantilever |